Manufacturing technology of the scales used in the incremental reading systems

Georgeta Ionascu; Despina Duminica

doi:10.1117/12.520046

30 September 2003 Manufacturing technology of the scales used in the incremental reading systems

Georgeta Ionascu, Despina Duminica

Proceedings Volume 5227, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies; (2003) https://doi.org/10.1117/12.520046
Event: 2003 Chapter books, 2003, Bellingham, WA, United States

Abstract

The objective of this paper is to research some technological aspects concerning with the execution of the dividing (incremental) disk, which is a component part of the incremental rotating transducers. The performed investigations deal with the manufacturing process by material addition, using the selective vacuum evaporation of thin metal films through a contact metallic mask. There are presented the technological stages of execution of the masks, realized as incremental metallic disks of small sizes. The shadow effect causes the non-uniformity of thickness of the films in the mask gaps. In this regard, the authors present a mathematical model for the film profile evaluation in the case of planetary system evaporation using an electron gun as vapor source.

Citation Download Citation

Georgeta Ionascu and Despina Duminica "Manufacturing technology of the scales used in the incremental reading systems", Proc. SPIE 5227, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies, (30 September 2003); https://doi.org/10.1117/12.520046

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