A Portable Scatterometer For Optical Shop Use

William L. Wolfe; Kathleen Magee; Douglas W. Wolfe

doi:10.1117/12.946358

3 September 1985 A Portable Scatterometer For Optical Shop Use

William L. Wolfe, Kathleen Magee, Douglas W. Wolfe

Proceedings Volume 0525, Measurement and Effects of Surface Defects & Quality of Polish; (1985) https://doi.org/10.1117/12.946358
Event: 1985 Los Angeles Technical Symposium, 1985, Los Angeles, United States

Abstract

The scattering of optical components has become a more and more critical issue in modern sensor systems. This is a result of improved performance capabilities on the part of detectors and of optical elements themselves, as well as an increased awareness of the effects of scatter on system performance. There are several programs that evaluate scatter in complicated optical trains, the best known of which are APART and GUERAP (Arizona Paraxial Analysis of Radiative Transfer and General Unwanted Energy Radiation Analysis Program). These programs require component scatter data as inputs for the analysis and even the beginning design approaches. These data have generally been generated with laboratory instruments that were essentially goniometric radiometers. The data have been difficult to obtain and usually obtained for small representative samples of the real surfaces. If, in the process of manufacture of the parts a measurement of the scatter was made, it was done with a relatively crude jerry-rigged apparatus. Sometimes the measurements made this way were quite accurate, but they were never easy.

Citation Download Citation

William L. Wolfe, Kathleen Magee, and Douglas W. Wolfe "A Portable Scatterometer For Optical Shop Use", Proc. SPIE 0525, Measurement and Effects of Surface Defects & Quality of Polish, (3 September 1985); https://doi.org/10.1117/12.946358

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