Design and fabrication of biperiodic AR gratings for the infrared

Ludovic Escoubas; Michele Loli; Jean-Jacques Simon; Hugues Giovannini; Francois Flory; Frederic Lemarquis; Stefan Enoch; Gerard Berginc

doi:10.1117/12.512709

25 February 2004 Design and fabrication of biperiodic AR gratings for the infrared

Ludovic Escoubas, Michele Loli, Jean-Jacques Simon, Hugues Giovannini, Francois Flory, Frederic Lemarquis, Stefan Enoch, Gerard Berginc

Author Affiliations +

Proceedings Volume 5250, Advances in Optical Thin Films; (2004) https://doi.org/10.1117/12.512709
Event: Optical Systems Design, 2003, St. Etienne, France

Abstract

We have designed and fabricated a silicon grating which shows antireflection properties in the [4μm ; 6 μm] spectral region. It is shown both theoretically and experimentally that, even if the refractive index and the grating period are in the extend that a simple homogenization theory can not be used, a substantial broadband antireflection effect can be obtained. The grating was made using a wet anisotropic etching technique. The reflectance was calculated with a modal method and compared successfully with the experimental results. It is shown that the grating reduces the silicon substrate reflectance in the whole [4 μm ; 6 μm] spectral domain by a factor greater than 10.

Citation Download Citation

Ludovic Escoubas, Michele Loli, Jean-Jacques Simon, Hugues Giovannini, Francois Flory, Frederic Lemarquis, Stefan Enoch, and Gerard Berginc "Design and fabrication of biperiodic AR gratings for the infrared", Proc. SPIE 5250, Advances in Optical Thin Films, (25 February 2004); https://doi.org/10.1117/12.512709

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available