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25 February 2004 High-precision longpass filter arrays for miniature spectrometers
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Abstract
Arrays of longpass filter coatings for high order suppression in miniature spectrometers were produced by plasma-ion assisted deposition and photolithogaphy. The filter edges were imaged by optical microscopy, scanning electron microscopy, and scanning force microscopy. Whereas a positioning accuracy of about 2 microns was achieved, the width of the filter edges varied between 2 and 10 microns.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Stefan Jakobs and Uwe B. Schallenberg "High-precision longpass filter arrays for miniature spectrometers", Proc. SPIE 5250, Advances in Optical Thin Films, (25 February 2004); https://doi.org/10.1117/12.516918
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