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25 February 2004High-precision longpass filter arrays for miniature spectrometers
Arrays of longpass filter coatings for high order suppression in miniature spectrometers were produced by plasma-ion assisted deposition and photolithogaphy. The filter edges were imaged by optical microscopy, scanning electron microscopy, and scanning force microscopy. Whereas a positioning accuracy of about 2 microns was achieved, the width of the filter edges varied between 2 and 10 microns.
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Stefan Jakobs, Uwe B. Schallenberg, "High-precision longpass filter arrays for miniature spectrometers," Proc. SPIE 5250, Advances in Optical Thin Films, (25 February 2004); https://doi.org/10.1117/12.516918