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25 February 2004 Submicrometer scale growth morphology control: a new route for the making of photonic crystal structures?
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Abstract
The feasibility of micrometer scale morphologically controlled 1D stripe arrays by selective hydride vapour phase epitaxy (HVPE) single step was assessed. HVPE is a near-equilibrium growth process which offers perfect selectivity whatever the pattern design thus giving rise to a great flexibility. The HVPE growth being mainly governed by the surface kinetics intrinsic anisotropy of the crystal, we have demonstrated that various growth morphologies could be stabilised at a mesoscopic scale by controlling the hierarchy of the growth rates of the low index faces of III-V crystals via the growth temperature and the composition of the vapour phase. Micrometer scale dielectric periodic structures constituted of 1μm wide GaAs beams alternately stacked with air were then grown by selective HVPE on GaAs substrates. Potential of the HVPE growth technic for the making of submicrometer scale structures is finally discussed.
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Evelyne Gil-Lafon, Agnes Trassoudaine, Dominique Castelluci, Alberto Pimpinelli, Rachida Saoudi, Olivier M. Parriaux, Alain Muravaud, and Claire Darraud "Submicrometer scale growth morphology control: a new route for the making of photonic crystal structures?", Proc. SPIE 5250, Advances in Optical Thin Films, (25 February 2004); https://doi.org/10.1117/12.513376
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