Picometer-resolution assessment of the period constancy in a FBG phase mask

Yves Jourlin; Alexandre V. Tishchenko; C. Pedri; Andrew G. Zanzal; James Unruh

doi:10.1117/12.513696

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26 February 2004 Picometer-resolution assessment of the period constancy in a FBG phase mask

Yves Jourlin, Alexandre V. Tishchenko, C. Pedri, Andrew G. Zanzal, James Unruh

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Proceedings Volume 5252, Optical Fabrication, Testing, and Metrology; (2004) https://doi.org/10.1117/12.513696
Event: Optical Systems Design, 2003, St. Etienne, France

Abstract

An ultra-high resolution measurement technique makes the assessment of the period uniformity in a long grating used as a phase mask for Fibre Bragg Gratings (FBG). It comprizes a pair of two identical displacement sensors placed close to each other at a strictly constant spacing flying over the grating under test at an essentially constant velocity. The phase difference between the two sensors is a simple function of the local spatial frequency of the grating. A proper solution of an inverse problem provides the period variation along the grating. The technique is used here to characterize phase masks fabricated by means of a MEBES 4500 electron beam pattern generator. The period does not deviate by more than 3 pm from the prescribed period over a length by more than 100 mm.

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Yves Jourlin, Alexandre V. Tishchenko, C. Pedri, Andrew G. Zanzal, and James Unruh "Picometer-resolution assessment of the period constancy in a FBG phase mask", Proc. SPIE 5252, Optical Fabrication, Testing, and Metrology, (26 February 2004); https://doi.org/10.1117/12.513696

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