Improvements in binary chrome CD performance utilizing an optimized 4th-generation reactor platform

Jason Plumhoff; Chris Constantine; Jong Shin; Brad Reelfs; Emmanuel Rausa

doi:10.1117/12.518138

17 December 2003 Improvements in binary chrome CD performance utilizing an optimized 4th-generation reactor platform

Jason Plumhoff, Chris Constantine, Jong Shin, Brad Reelfs, Emmanuel Rausa

Proceedings Volume 5256, 23rd Annual BACUS Symposium on Photomask Technology; (2003) https://doi.org/10.1117/12.518138
Event: Photomask Technology, 2003, Monterey, California, United States

Abstract

The ITRS roadmap indicates that significant improvements in photomask dry etching will be necessary to achieve the design goals of 90nm and 65nm technology node masks. Although some existing dry etch systems are capable of R&D work on these masks, a new dry etch system is needed to achieve production worthy results. To this end, a new 4th generation mask etch system was designed and built by Unaxis USA, Inc. In early testing, the Unaxis Mask Etcher 4 has demonstrated significant improvements in CD uniformity and linearity compared to earlier systems. A designed experiment (DoE) was performed on this new system to more fully characterize its performance window. The results of these experiments are presented and compared to a standard process performed on a Unaxis Mask Etcher 3.

Citation Download Citation

Jason Plumhoff, Chris Constantine, Jong Shin, Brad Reelfs, and Emmanuel Rausa "Improvements in binary chrome CD performance utilizing an optimized 4th-generation reactor platform", Proc. SPIE 5256, 23rd Annual BACUS Symposium on Photomask Technology, (17 December 2003); https://doi.org/10.1117/12.518138

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available