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30 September 2003 A single-crystal piezoelectric scanner for scanning probe microscopy
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Proceedings Volume 5264, Optomechatronic Systems IV; (2003)
Event: Photonics Technologies for Robotics, Automation, and Manufacturing, 2003, Providence, RI, United States
In this paper, a small size monolithic XY scanner was designed and fabricated. The scanner has a flat triangular shape and consists of two 0.5mm-thick and 5mm-long lead-zinc-niobate-lead-titanate ((1x)Pb(ZnNb)O3 - xPbTiO3) or PZN-PT rods. The use of this material is critical to the reduction of the scanner size. The mechanical resonance characteristics for the PZN-PT rods and the assembled scanner were tested. The fabricated scanner provides a high resonance frequency and assured parallelism between the scanner and the sample surface. It enables a fast open loop control capability that naturally lends itself to use in scanning probe microscopy. The scanner and a self-sensing cantilever were integrated into a small-size atomic force microscope (AFM) design. A commercially available self-sensing cantilever and an additional actuator were used for contact scanning of a HOPG (Highly Ordered Pyrolytic Graphite) sample surface. The scanning performance of the scanner was verified by obtaining atomically resolved image of the HOPG surface.
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Kee S. Moon, Yong K. Hong, and Sung-Q Lee "A single-crystal piezoelectric scanner for scanning probe microscopy", Proc. SPIE 5264, Optomechatronic Systems IV, (30 September 2003);

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