High-speed precision surface profilometry using large phase shifting

Masaaki Adachi; Kakuji Ueda

doi:10.1117/12.515164

30 September 2003 High-speed precision surface profilometry using large phase shifting

Masaaki Adachi, Kakuji Ueda

Proceedings Volume 5264, Optomechatronic Systems IV; (2003) https://doi.org/10.1117/12.515164
Event: Photonics Technologies for Robotics, Automation, and Manufacturing, 2003, Providence, RI, United States

Abstract

We propose a new vertical-scanning profilometry which has high-speed in measurements. The proposed profilometry measures 3-D shape by using phase-shifting technique with large phase shifts around 6 π ± π /2. With such large shifts, 2 π phase ambiguities normally suffer precise measurements of shapes. Therefore, the profilometry is equipped with two short-coherent-light sources of different mean-wavelength and alternately acquires interferogram for each wavelength every large phase shift (one interferogram /one shift). From the interferograms acquired through vertical scanning , it searches the highest-contrast frame position regarding the each wavelength and calculates the phases with the searched frames. From the phases of the two wavelengths and a vertical-scanning step height (relating to the large phase shifting), 3-D profile is calculated with a precision as high as a well-known phase-shifting interferometry.

Citation Download Citation

Masaaki Adachi and Kakuji Ueda "High-speed precision surface profilometry using large phase shifting", Proc. SPIE 5264, Optomechatronic Systems IV, (30 September 2003); https://doi.org/10.1117/12.515164

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