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10 June 2004 Design/deposition process tradeoffs for high-performance optical coatings in the DUV spectral region
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Abstract
The selection of coating materials for the design and production of optical components has to satisfy at least two criteria: (1) the component’s spectral performance requirements and (2) the survivability in the system’s operational environment. In many instances tradeoffs are required to satisfy both conditions. This paper offers tradeoffs in the material selection and deposition process conditions that provide high performance, stable coating structures for optical components in the deep ultraviolet (DUV) for excimer laser microlithography and micromachining applications. A critical necessity of these coatings is long lifetime survivability under the continuous operation of high fluence, pulsed laser irradiation; the continuous operation can number in the tens of billions pulses. Spectral performance data and lifetime survivability data will be presented.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. Earl Rudisill "Design/deposition process tradeoffs for high-performance optical coatings in the DUV spectral region", Proc. SPIE 5273, Laser-Induced Damage in Optical Materials: 2003, (10 June 2004); https://doi.org/10.1117/12.524042
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