Enhancement of surface-damage resistance by removing subsurface damage in fused silica

Tomosumi Kamimura; Shigenori Akamatsu; Masashi Yamamoto; Ichiro Yamato; Haruya Shiba; Shinji Motokoshi; Takayasu Sakamoto; Takahisa Jitsuno; Takayuki Okamoto; Kunio Yoshida

doi:10.1117/12.524961

10 June 2004 Enhancement of surface-damage resistance by removing subsurface damage in fused silica

Tomosumi Kamimura, Shigenori Akamatsu, Masashi Yamamoto, Ichiro Yamato, Haruya Shiba, Shinji Motokoshi, Takayasu Sakamoto, Takahisa Jitsuno, Takayuki Okamoto, Kunio Yoshida

Author Affiliations +

Proceedings Volume 5273, Laser-Induced Damage in Optical Materials: 2003; (2004) https://doi.org/10.1117/12.524961
Event: XXXV Annual Symposium on Optical Materials for High Power Lasers: Boulder Damage Symposium, 2003, Boulder, Colorado, United States

Abstract

The surface-damage resistance of fused silica was enhanced 2.8-fold by removing a subsurface damage. For the conventionally polished fused silica surface, μm-scale subsurface damage and a shallow (20 nm to 100 nm) structurally modified zone produced during grinding and polishing were formed on the top of surface. Several surface etching techniques and super-precise polishing process were used to remove subsurface damage from a fused silica surface. First the conventionally polished surfaces were chemically etched in a buffered HF solution to remove 300μm of surface material, and then super-precise polishing was performed to obtain an optical surface. After that, the polishing compound was removed by using ion-beam etching. The effect of subsurface damage on laser damage resistance was characterized by the measuring of the laser-induced damage threshold (LIDT) for the laser radiations of 1064 nm and 266 nm respectively. For the wavelength of 1064 nm, the effect of the removal of subsurface damage wasn't clearly seen, although the enhancement of surface-damage resistance by the ion-beam etching could be confirmed. However, in the case of 266 nm, enhanced LIDT of 28 J/cm² was obtained from the subsurface damage removed surface. The surface LIDT increased by 2.8 times compared to that of conventionally polished fused silica surfaces.

Citation Download Citation

Tomosumi Kamimura, Shigenori Akamatsu, Masashi Yamamoto, Ichiro Yamato, Haruya Shiba, Shinji Motokoshi, Takayasu Sakamoto, Takahisa Jitsuno, Takayuki Okamoto, and Kunio Yoshida "Enhancement of surface-damage resistance by removing subsurface damage in fused silica", Proc. SPIE 5273, Laser-Induced Damage in Optical Materials: 2003, (10 June 2004); https://doi.org/10.1117/12.524961

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE