Micromachining of bulk transparent materials using nanojoule femtosecond laser pulses (Abstract Only)

Chris B. Schaffer; Tyson N. Kim; Jose F. Garcia; Eric Mazur; Alexander Groisman; David Kleinfeld

doi:10.1117/12.525443

10 June 2004 Micromachining of bulk transparent materials using nanojoule femtosecond laser pulses (Abstract Only)

Chris B. Schaffer, Tyson N. Kim, Jose F. Garcia, Eric Mazur, Alexander Groisman, David Kleinfeld

Author Affiliations +

Proceedings Volume 5273, Laser-Induced Damage in Optical Materials: 2003; (2004) https://doi.org/10.1117/12.525443
Event: XXXV Annual Symposium on Optical Materials for High Power Lasers: Boulder Damage Symposium, 2003, Boulder, Colorado, United States

Abstract

Femtosecond lasers are very effective tools for three-dimensional micromachining of transparent materials. Nonlinear absorption of tightly focused femtosecond laser pulses allows energy to be deposited in a micrometer-sized volume in the bulk of the sample. If enough energy is deposited, localized changes in the material are produced (a change in refractive index, for example). These localized changes are the building blocks from which three-dimensional structures can be produced. With sufficiently tight focusing, the threshold for producing these changes can be achieved with pulse energies that are available directly from laser oscillators, offering greatly increased machining speeds and simpler, cheaper technology compared to using amplified lasers. In addition, the inter-pulse spacing from a laser oscillator is much shorter than the time required for energy deposited by one pulse to diffuse out of the focal volume. As a result, irradiation with multiple pluses on one spot in the sample leads to an accumulation of heat around the focal region. This localized heating provides another mechanism by which material properties can be altered. We demonstrate the three-dimensional fabrication of optical waveguides and microfluidic channels using pulse energies of only a few nanojoules to tens of nanojoules.

Citation Download Citation

Chris B. Schaffer, Tyson N. Kim, Jose F. Garcia, Eric Mazur, Alexander Groisman, and David Kleinfeld "Micromachining of bulk transparent materials using nanojoule femtosecond laser pulses (Abstract Only)", Proc. SPIE 5273, Laser-Induced Damage in Optical Materials: 2003, (10 June 2004); https://doi.org/10.1117/12.525443

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE