Paper
10 June 2004 Ultrashort pulse damage of semiconductors
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Abstract
First, we give a briefly critically discuss the existing definitions of melting and damage thresholds and the different kinds of experimental determinations of the thresholds. Then we investigate the thermal and athermal melting of oxides (wide-band gap semiconductors) and of silicon by solving a rate equation for the excited electrons and a by complete self-consistent solution of a coupled system of differential equations for the electron density and for the electron and phonon temperatures. In particular, we direct our attention to the still open question about the value for the critical electron density in the case of athermal melting.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bernd Hüttner "Ultrashort pulse damage of semiconductors", Proc. SPIE 5273, Laser-Induced Damage in Optical Materials: 2003, (10 June 2004); https://doi.org/10.1117/12.524095
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CITATIONS
Cited by 3 scholarly publications.
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KEYWORDS
Electrons

Phonons

Semiconductors

Laser damage threshold

Plasmas

Chromium

Ultrafast phenomena

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