Finite element simulations of stacked crystal filters

Jiunn-Horng Lee; Kung-Yu Tzeng; Chih-Wei Cheng; Yu-Ching Shih; Chih-Min Yao

doi:10.1117/12.522915

30 March 2004 Finite element simulations of stacked crystal filters

Jiunn-Horng Lee, Kung-Yu Tzeng, Chih-Wei Cheng, Yu-Ching Shih, Chih-Min Yao

Proceedings Volume 5274, Microelectronics: Design, Technology, and Packaging; (2004) https://doi.org/10.1117/12.522915
Event: Microelectronics, MEMS, and Nanotechnology, 2003, Perth, Australia

Abstract

Wireless networks are growing rapidly. Their applications include cellular phone, satellite communication and wireless local area networks. In order to avoid interference between all these applications, high selectivity RF filters are essential. The stacked crystal filter (SCF) is a useful configuration when low insertion loss is desired and the near-in skirt selectivity requirement is not as high as that produced by ladder filters. A SCF is an acoustically coupled resonator filter which includes a pair of thickness mode piezoelectric plates attached to each other. Mounted between adjacent sides of the two plates is a shared electrode. The common ways to model the SCF are mason model and lumped element equivalent circuit method. To accommodate complicated geometries, we need to use the other kinds of numerical analysis techniques. Finite element methods have been applied to the modeling of thin film bulk acoustic wave resonator in recent years. Advanced FEM software has the capability to do a coupled piezoelectric-circuit analysis that can connect electrical circuits directly to the piezoelectric finite element models. In this work, we integrate the SCF two-dimensional piezoelectric finite element models and electrical circuits together to simulate the performance of SCF. The influences of electrode property and acoustic loss to the performance of filter are also investigated. The results of simulation are verified by mason model. This methodology can be applied to more complicated geometry models and other types of filters simulation such as coupled resonator filters (CRF) and ladder filters.

Citation Download Citation

Jiunn-Horng Lee, Kung-Yu Tzeng, Chih-Wei Cheng, Yu-Ching Shih, and Chih-Min Yao "Finite element simulations of stacked crystal filters", Proc. SPIE 5274, Microelectronics: Design, Technology, and Packaging, (30 March 2004); https://doi.org/10.1117/12.522915

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