Area-changed capacitive accelerometer using 3-mask fabrication process

Yeop Majlis Burhanuddin; Bais Badariah; Agus Santoso Tamsir

doi:10.1117/12.523631

2 April 2004 Area-changed capacitive accelerometer using 3-mask fabrication process

Yeop Majlis Burhanuddin, Bais Badariah, Agus Santoso Tamsir

Proceedings Volume 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III; (2004) https://doi.org/10.1117/12.523631
Event: Microelectronics, MEMS, and Nanotechnology, 2003, Perth, Australia

Abstract

This paper presents an area-changed capacitive accelerometer using a 3-mask fabrication process. The accelerometer is designed as finger structures connected in parallel that have a differential capacitor arrangement. The movable electrodes are mounted on a proof mass of silicon and a pair of stationary electrodes of polysilicon is formed under the mass with a 3 μm air gap. The fabrication process utilizes silicon/glass anodic bonding and deep reactive ion etching (DRIE) for high aspect ratio etching. The simulated mass displacement change rate is 0.076 μm/g and the overall sensitivity is -0.04/μm. This type of accelerometer will be characterized for low-g as well as for medium-g applications.

Citation Download Citation

Yeop Majlis Burhanuddin, Bais Badariah, and Agus Santoso Tamsir "Area-changed capacitive accelerometer using 3-mask fabrication process", Proc. SPIE 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III, (2 April 2004); https://doi.org/10.1117/12.523631

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