Performance of a novel non-planar diaphragm and its application to optical sensing devices

Weijun Wang; Rongming Lin; Da Gang Guo; Tie Tun Sun

doi:10.1117/12.521287

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2 April 2004 Performance of a novel nonplanar diaphragm and its application to optical sensing devices

Weijun Wang, Rongming Lin, Da Gang Guo, Tie Tun Sun

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Proceedings Volume 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III; (2004) https://doi.org/10.1117/12.521287
Event: Microelectronics, MEMS, and Nanotechnology, 2003, Perth, Australia

Abstract

We present a new single-chip diaphragm-type Fabry-Perot microcavity pressure sensor with a novel single deeply corrugated diaphragm. Both analytical and experimental results have shown that some common issues, such as signal-averaging effect and cross-sensitivity to temperature with diaphragm-type Fabry-Perot microcavity pressure sensors, can be substantially alleviated by the proposed technique.

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Weijun Wang, Rongming Lin, Da Gang Guo, and Tie Tun Sun "Performance of a novel nonplanar diaphragm and its application to optical sensing devices", Proc. SPIE 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III, (2 April 2004); https://doi.org/10.1117/12.521287

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