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2 April 2004 Performance of a novel nonplanar diaphragm and its application to optical sensing devices
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Abstract
We present a new single-chip diaphragm-type Fabry-Perot microcavity pressure sensor with a novel single deeply corrugated diaphragm. Both analytical and experimental results have shown that some common issues, such as signal-averaging effect and cross-sensitivity to temperature with diaphragm-type Fabry-Perot microcavity pressure sensors, can be substantially alleviated by the proposed technique.
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Weijun Wang, Rongming Lin, Da Gang Guo, and Tie Tun Sun "Performance of a novel nonplanar diaphragm and its application to optical sensing devices", Proc. SPIE 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III, (2 April 2004); https://doi.org/10.1117/12.521287
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