Compact integrated waveguide turning mirror in SOI

Wenhui Wang; Yanzhe Tang; Liping Cui; Yaming Wu; Jianyi Yang; Yuelin Wang

doi:10.1117/12.521682

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30 April 2004 Compact integrated waveguide turning mirror in SOI

Wenhui Wang, Yanzhe Tang, Liping Cui, Yaming Wu, Jianyi Yang, Yuelin Wang

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Proceedings Volume 5279, Optical Fibers and Passive Components; (2004) https://doi.org/10.1117/12.521682
Event: Asia-Pacific Optical and Wireless Communications, 2003, Wuhan, China

Abstract

Planar lightwave circuits based on silicon are playing important roles in integrated optical systems. The integrated waveguide turning mirror (IWTM) is essential component for the compactness of optical devices. We designed and fabricated an integrated waveguide turning mirror with a 90° directional change in SOI. The mirror was etched by induct-coupled-plasma etching (ICP) first. Then the surface was enhanced by wet anisotropic etching. This two-step process introduced a compact IWTM with smooth and vertical surface. Compared with the mirror fabricated by wet anisotropic etching only, the mirror fabricate by the two-step process is better to meet the requirement of compact design.

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Wenhui Wang, Yanzhe Tang, Liping Cui, Yaming Wu, Jianyi Yang, and Yuelin Wang "Compact integrated waveguide turning mirror in SOI", Proc. SPIE 5279, Optical Fibers and Passive Components, (30 April 2004); https://doi.org/10.1117/12.521682

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