MEMS SIOB design for integrated transceiver application

Yirong Yang; Yanmin Cai; Yuelin Wang; Jianyi Yang; Yaming Wu; Le Luo; Xiqing Sun

doi:10.1117/12.519922

7 May 2004 MEMS SIOB design for integrated transceiver application

Yirong Yang, Yanmin Cai, Yuelin Wang, Jianyi Yang, Yaming Wu, Le Luo, Xiqing Sun

Proceedings Volume 5281, Optical Transmission, Switching, and Subsystems; (2004) https://doi.org/10.1117/12.519922
Event: Asia-Pacific Optical and Wireless Communications, 2003, Wuhan, China

Abstract

A novel self-aligning SIOB (SIlicon Optical Bench) for fully passive alignment of optical components is proposed for integrated transceiver modules. The coupling efficiency from laser diode directly to fiber is about 8% in theory because of severe mode mismatch and large NA difference. To pursue high coupling efficiency, a ball lens is added between laser diode and fiber. The calculations and simulations are done to optimize the optical system according to optical component specifications. The coupling efficiency is up to 45%. We designed the layout and fabricated the SIOB in (100) silicon wafer to obtain the demanding cavities by MEMS technology.

Citation Download Citation

Yirong Yang, Yanmin Cai, Yuelin Wang, Jianyi Yang, Yaming Wu, Le Luo, and Xiqing Sun "MEMS SIOB design for integrated transceiver application", Proc. SPIE 5281, Optical Transmission, Switching, and Subsystems, (7 May 2004); https://doi.org/10.1117/12.519922

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