Materials Characterization Tools For Advanced Ion Beam Processes

Michael D. Strathman

doi:10.1117/12.946483

9 April 1985 Materials Characterization Tools For Advanced Ion Beam Processes

Michael D. Strathman

Proceedings Volume 0530, Advanced Applications of Ion Implantation; (1985) https://doi.org/10.1117/12.946483
Event: 1985 Los Angeles Technical Symposium, 1985, Los Angeles, United States

Abstract

This paper will discuss the application of Rutherford backscattering technology and secondary ion mass spectrometry to advanced ion beam processes. Two particular processes, high current implantation and high energy implantation will be investigated.

Citation Download Citation

Michael D. Strathman "Materials Characterization Tools For Advanced Ion Beam Processes", Proc. SPIE 0530, Advanced Applications of Ion Implantation, (9 April 1985); https://doi.org/10.1117/12.946483

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