Using Six-Point Probe Meter Models 101 And 101C

James T.C. Chen

doi:10.1117/12.946489

9 April 1985 Using Six-Point Probe Meter Models 101 And 101C

James T.C. Chen

Proceedings Volume 0530, Advanced Applications of Ion Implantation; (1985) https://doi.org/10.1117/12.946489
Event: 1985 Los Angeles Technical Symposium, 1985, Los Angeles, United States

Abstract

The concept of using the Six-Point-Probe Meter for various cases of sheet resistivity measurements is introduced, its principle is analyzed and the instructions for the applications are presented.

Citation Download Citation

James T.C. Chen "Using Six-Point Probe Meter Models 101 And 101C", Proc. SPIE 0530, Advanced Applications of Ion Implantation, (9 April 1985); https://doi.org/10.1117/12.946489

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