First use of a high-sensitivity active pixel sensor array as a detector for electron microscopy

Nguyen-Huu Xuong; Anna-Clare Milazzo; Philippe LeBlanc; Fred Duttweiler; James Bouwer; Steve Peltier; Mark Ellisman; Peter Denes; Fred Bieser; Howard S. Matis; Howard Wieman; Stuart Kleinfelder

doi:10.1117/12.526021

7 June 2004 First use of a high-sensitivity active pixel sensor array as a detector for electron microscopy

Nguyen-Huu Xuong, Anna-Clare Milazzo, Philippe LeBlanc, Fred Duttweiler, James Bouwer, Steve Peltier, Mark Ellisman, Peter Denes, Fred Bieser, Howard S. Matis, Howard Wieman, Stuart Kleinfelder

Author Affiliations +

Proceedings Volume 5301, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications V; (2004) https://doi.org/10.1117/12.526021
Event: Electronic Imaging 2004, 2004, San Jose, California, United States

Abstract

There is an urgent need to replace film and CCD cameras as recording instruments for transmission electron microscopy (TEM). Film is too cumbersome to process and CCD cameras have low resolution, marginal to poor signal-to-noise ratio for single electron detection and high spatial distortion. To find a replacement device, we have tested a high sensitivity active pixel sensor (APS) array currently being developed for nuclear physics. The tests were done at 120 keV in a JEOL 1200 electron microscope. At this energy, each electron produced on average a signal-tonoise ratio about 20/1. The spatial resolution was also excellent with the full width at half maximum (FWHM) about 20 microns. Since it is very radiation tolerant and has almost no spatial distortion, the above tests showed that a high sensitivity CMOS APS array holds great promise as a direct detection device for electron microscopy.

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Nguyen-Huu Xuong, Anna-Clare Milazzo, Philippe LeBlanc, Fred Duttweiler, James Bouwer, Steve Peltier, Mark Ellisman, Peter Denes, Fred Bieser, Howard S. Matis, Howard Wieman, and Stuart Kleinfelder "First use of a high-sensitivity active pixel sensor array as a detector for electron microscopy", Proc. SPIE 5301, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications V, (7 June 2004); https://doi.org/10.1117/12.526021

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