Paper
7 June 2004 Two-phase full-frame CCD with double ITO gate structure for increased sensitivity
William Des Jardin, Steve Kosman, Neal Kurfiss, James Johnson, David Losee, Gloria G. Putnam, Anthony Tanbakuchi
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Abstract
In 1999 Kodak introduced the first two-phase, front-illuminated, full-frame CCD in which the electrodes corresponding to one phase were composed of Indium Tin Oxide (ITO), a material more transmissive than poly silicon. In an effort to further increase the sensitivity of front-illuminated image sensors, Kodak has developed an all-ITO electrode CCD. A 1280 x 1024 sensor with 16-mm pixels has been manufactured and characterized. The imaging performance of this device, including its sensitivity, dark current, and charge transfer efficiency, is described. The noise characteristics of the ITO-gated output amplifier MOSFET are also discussed.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
William Des Jardin, Steve Kosman, Neal Kurfiss, James Johnson, David Losee, Gloria G. Putnam, and Anthony Tanbakuchi "Two-phase full-frame CCD with double ITO gate structure for increased sensitivity", Proc. SPIE 5301, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications V, (7 June 2004); https://doi.org/10.1117/12.530882
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KEYWORDS
Charge-coupled devices

Quantum efficiency

Sensors

Field effect transistors

Electrodes

Microlens

Etching

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