Paper
15 July 2004 Fundamental aspects in machining of metals with short and ultrashort laser pulses
Author Affiliations +
Abstract
On the fast growing market of precision micro-machining of metals lasers do not only compete with other methods of structuring. There is also strong competition among different laser-processing strategies and, especially, among laser sources with different pulse duration. A comprehensive study of laser micro-machining with nanosecond, picosecond, and femtosecond laser pulses will be presented with a focus on fundamental aspects of the processes and on their practical consequences. An analysis will be given of the potential or the limitations of these laser processes with respect to their industrial application.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Detlef Breitling, Andreas Ruf, and Friedrich Dausinger "Fundamental aspects in machining of metals with short and ultrashort laser pulses", Proc. SPIE 5339, Photon Processing in Microelectronics and Photonics III, (15 July 2004); https://doi.org/10.1117/12.541434
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Cited by 145 scholarly publications.
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KEYWORDS
Metals

Ultrafast phenomena

Micromachining

Photovoltaics

Laser marking

Laser sources

Microelectronics

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