RF MEMS technologies fabricated using low-temperature processing

Christopher W. Dyck; Christopher D. Nordquist; Garth M. Kraus

doi:10.1117/12.538377

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30 December 2003 RF MEMS technologies fabricated using low-temperature processing

Christopher W. Dyck, Christopher D. Nordquist, Garth M. Kraus

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Proceedings Volume 5342, Micromachining and Microfabrication Process Technology IX; (2003) https://doi.org/10.1117/12.538377
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States

Abstract

Radio frequency microelectromechanical systems (RF MEMS) is an enabling technology for the miniaturization of future radar and communication systems. RF MEMS ohmic and capacitive switch performance and fabrication are discussed. Sandia National Laboratories’ program in RF MEMS is motivated by defense and national security applications not currently being met by the private sector. Examples of fabricated switches and switched circuits under investigation at Sandia are presented.

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Christopher W. Dyck, Christopher D. Nordquist, and Garth M. Kraus "RF MEMS technologies fabricated using low-temperature processing", Proc. SPIE 5342, Micromachining and Microfabrication Process Technology IX, (30 December 2003); https://doi.org/10.1117/12.538377

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