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23 December 2003 The reliability of RF-MEMS: failure modes, test procedures, and instrumentation
Ingrid De Wolf
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Proceedings Volume 5343, Reliability, Testing, and Characterization of MEMS/MOEMS III; (2003) https://doi.org/10.1117/12.532335
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States
Abstract
This paper discusses some reliability issues that play a role for capacitive RF MEMS switches. We describe how these degradation mechanisms affect the functioning of the switches. Also the methodology that can be used to test capacitive RF MEMS switches, including some packaging aspects, and dedicated instrumentation required to perform these tests are discussed.
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Ingrid De Wolf "The reliability of RF-MEMS: failure modes, test procedures, and instrumentation", Proc. SPIE 5343, Reliability, Testing, and Characterization of MEMS/MOEMS III, (23 December 2003); https://doi.org/10.1117/12.532335
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KEYWORDS
Switches
Reliability
Microelectromechanical systems
Bridges
Dielectrics
Capacitance
Switching
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