Curved MEMS resonators yield infrasonic resonant frequencies on single-chip in simulation study

Carlos P. Borras; Harold L. Stalford

doi:10.1117/12.524620

24 January 2004 Curved MEMS resonators yield infrasonic resonant frequencies on single-chip in simulation study

Carlos P. Borras, Harold L. Stalford

Proceedings Volume 5344, MEMS/MOEMS Components and Their Applications; (2004) https://doi.org/10.1117/12.524620
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States

Abstract

This paper is motivated by the challenge to develop mechanical resonators with fundamental resonant frequencies in the infrasonic range 1-20 Hz that fit onto a single-chip module. In this paper, we present preliminary findings based on finite element modeling (FEM) analysis of designs prepared for fabrication based on SUMMiT V^TM surface micromachining technology using curve-shaped beams clamped at both ends. Circular shapes considered are a flat-horseshoe shape (thickness is transverse to plane of substrate) and a split-ring shape (width is transverse to plane of substrate). For the FEM simulation study, we considered a single-chip module space size of 6mm diameter and resonators with 1 μm beam thickness. Designs are considered with and without added mass. We find that an order of magnitude reduction in the 1st mode resonant frequency is achievable by curving beams into a space of fixed size. The simulation results show that infrasonic resonant frequencies 2-20 Hz are achievable by curve-shaped resonators with “added mass” with 1 μm beam thickness for single-chip 6mm-diameter size.

Citation Download Citation

Carlos P. Borras and Harold L. Stalford "Curved MEMS resonators yield infrasonic resonant frequencies on single-chip in simulation study", Proc. SPIE 5344, MEMS/MOEMS Components and Their Applications, (24 January 2004); https://doi.org/10.1117/12.524620

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