Fabrication of ball-type spherical microlens array for optical fiber coupling

Ying-Ruel Huang; Hwai-Pwu Chou

doi:10.1117/12.524226

29 December 2003 Fabrication of ball-type spherical microlens array for optical fiber coupling

Ying-Ruel Huang, Hwai-Pwu Chou

Proceedings Volume 5347, Micromachining Technology for Micro-Optics and Nano-Optics II; (2003) https://doi.org/10.1117/12.524226
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States

Abstract

This paper presents a ball type microlens made of photoresist SU-8, which allows light focusing in all directions on the substrate surface and thus provides application flexibility. We have developed a low temperature batch process that uses UV lithography for patterning, bulk machining for nozzle fabrication, and then pressing SU-8 through nozzles for ball formulation. A 24 x 24 lens array has been fabricated. The micro-balls can be made with diameters from 80 to 500 μm and focal lengths from 50 to 300 μm. Measurements indicated that the error of the diameter was within 3%; variations among batches are within 10%. The major contribution to the uncertainty is due to the uncertainty of the pressing force. Spectral density distribution measurements were also performed to verify the focusing ability of ball lenses. The measured numerical aperture is about 0.63 that is satisfactory for most micro-optical applications.

Citation Download Citation

Ying-Ruel Huang and Hwai-Pwu Chou "Fabrication of ball-type spherical microlens array for optical fiber coupling", Proc. SPIE 5347, Micromachining Technology for Micro-Optics and Nano-Optics II, (29 December 2003); https://doi.org/10.1117/12.524226

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