Laser microfabrication of photonic crystal structures on silicon wafers

Qiying Chen; Suwas Nikumb

doi:10.1117/12.524569

29 December 2003 Laser microfabrication of photonic crystal structures on silicon wafers

Qiying Chen, Suwas Nikumb

Proceedings Volume 5347, Micromachining Technology for Micro-Optics and Nano-Optics II; (2003) https://doi.org/10.1117/12.524569
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States

Abstract

A new, versatile approach, applicable to virtually all substrate compositions on laser precision microfabrication of silicon wafers to achieve long-range ordering of colloidal crystals is proposed and demonstrated. In the absence of any surface pattern, the colloid spheres assemble in a randomly packed fashion. However, the presence of a surface pattern induces an ordered packing of the spheres on the lands with hexagonal packing. The colloidal crystal order can be controlled by choosing suitable spatial period of the laser micro-machined template.

Citation Download Citation

Qiying Chen and Suwas Nikumb "Laser microfabrication of photonic crystal structures on silicon wafers", Proc. SPIE 5347, Micromachining Technology for Micro-Optics and Nano-Optics II, (29 December 2003); https://doi.org/10.1117/12.524569

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available