Translator Disclaimer
Paper
1 July 2004 Fabrication of optical ring resonators in silicon on insulator
Author Affiliations +
Abstract
In an effort to determine low-cost alternatives for components currently used in DWDM, optical ring resonators are currently being investigated. The well-known microfabrication techniques of silicon, coupled with the low propagation loss of single crystal silicon, make SOI an attractive material. Laterally coupled racetrack resonators utilising rib waveguides have been fabricated and preliminary results are discussed. An extinction ratio of 15.9 dB and a finesse of 11 have been measured.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
William Robert Headley, Graham T. Reed, Ansheng Liu, Oded Cohen, D. Hak, Mario J. Paniccia, Simon Howe, and Inga Huille "Fabrication of optical ring resonators in silicon on insulator", Proc. SPIE 5357, Optoelectronic Integration on Silicon, (1 July 2004); https://doi.org/10.1117/12.527420
PROCEEDINGS
8 PAGES


SHARE
Advertisement
Advertisement
Back to Top