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16 June 2004 High-speed polyimide-planarized vertical-cavity surface-emitting lasers
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Abstract
Oxide-confined, polyimide-planarized 850 nm vertical cavity surface emitting lasers (VCSELs) with excellent high-speed performance were fabricated and characterized. The reproducible, simple process provides good metal adhesion to photodefined polyimide offering low capacitance without implantation or semi-insulating substrates. Microwave measurements are used to extract parameters for a physically based equivalent circuit for the VCSEL.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ahmad N. AL-Omari and Kevin L. Lear "High-speed polyimide-planarized vertical-cavity surface-emitting lasers", Proc. SPIE 5364, Vertical-Cavity Surface-Emitting Lasers VIII, (16 June 2004); https://doi.org/10.1117/12.532016
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