Current Status Of Ion Projection Lithography

G. Stengl; H. Loschner; W. Maurer; P. Wolf

doi:10.1117/12.947494

20 June 1985 Current Status Of Ion Projection Lithography

G. Stengl, H. Loschner, W. Maurer, P. Wolf

Proceedings Volume 0537, Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies IV; (1985) https://doi.org/10.1117/12.947494
Event: 1985 Microlithography Conferences, 1985, Santa Clara, United States

Abstract

Ion beam lithography is developed in three directions: Focused (FIBL), Masked (MIBL) and Ion Projection Lithography (IPL). IPL uses ions as information carrier in a demagnifying step-and-repeat exposure system. With an Ion Projection Lithography Machine (IPLM) a geometrical resolution < 0.25 μm can be obtained combined with a very high depth of focus:more than 100 μm. The high power densities possible with IPL permit not only pattern transfer in conventional organic resists but extend lithography to new processes using resistless ion beam modification techniques of materials. Experimental results obtained with a laboratory type Ion Projection Lithography Machine IPLM-01 are presented.

Citation Download Citation

G. Stengl, H. Loschner, W. Maurer, and P. Wolf "Current Status Of Ion Projection Lithography", Proc. SPIE 0537, Electron-Beam, X-Ray, and Ion-Beam Techniques for Submicrometer Lithographies IV, (20 June 1985); https://doi.org/10.1117/12.947494

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available