Experimental methodology of contact edge roughness on sub-100-nm pattern

Tae Yong Lee; Dongchul Ihm; Hyo Chun Kang; Jun Bum Lee; Byoung-Ho Lee; Soo-Bok Chin; Do-Hyun Cho; Yang Hyong Kim; Ho Dong Yang; Kyoung Mo Yang

doi:10.1117/12.534496

24 May 2004 Experimental methodology of contact edge roughness on sub-100-nm pattern

Tae Yong Lee, Dongchul Ihm, Hyo Chun Kang, Jun Bum Lee, Byoung-Ho Lee, Soo-Bok Chin, Do-Hyun Cho, Yang Hyong Kim, Ho Dong Yang, Kyoung Mo Yang

Author Affiliations +

Proceedings Volume 5375, Metrology, Inspection, and Process Control for Microlithography XVIII; (2004) https://doi.org/10.1117/12.534496
Event: Microlithography 2004, 2004, Santa Clara, California, United States

Abstract

The measurement of edge roughness has become a hot issue in the semiconductor industry. Major vendors offer a variety of features to measure the edge roughness in their CD-SEMs. However, most of the features are limited by the applicable pattern types. For the line and space patterns, features such as Line Edge Roughness (LER) and Line Width Roughness (LWR) are available in current CD-SEMs. The edge roughness is more critical in contact process. However the measurement of contact edge roughness (CER) or contact space roughness (CSR) is more complicated than that of LER or LWR. So far, no formal standard measurement algorithm or definition of contact roughness measurement exists. In this article, currently available features are investigated to assess their representability for CER or CSR. Some new ideas to quantify CER and CSR were also suggested with preliminary experimental results.

Citation Download Citation

Tae Yong Lee, Dongchul Ihm, Hyo Chun Kang, Jun Bum Lee, Byoung-Ho Lee, Soo-Bok Chin, Do-Hyun Cho, Yang Hyong Kim, Ho Dong Yang, and Kyoung Mo Yang "Experimental methodology of contact edge roughness on sub-100-nm pattern", Proc. SPIE 5375, Metrology, Inspection, and Process Control for Microlithography XVIII, (24 May 2004); https://doi.org/10.1117/12.534496

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available