Feedforward of mask open measurements on an integrated scatterometer to improve gate linewidth control

Matthew Sendelbach; Wesley Natzle; Charles N. Archie; Bill Banke; Dan Prager; Dan Engelhard; Jason Ferns; Asao Yamashita; Merritt Funk; Fumihiko Higuchi; Masayuki Tomoyasu

doi:10.1117/12.537969

24 May 2004 Feedforward of mask open measurements on an integrated scatterometer to improve gate linewidth control

Matthew Sendelbach, Wesley Natzle, Charles N. Archie, Bill Banke, Dan Prager, Dan Engelhard, Jason Ferns, Asao Yamashita, Merritt Funk, Fumihiko Higuchi, Masayuki Tomoyasu

Author Affiliations +

Proceedings Volume 5375, Metrology, Inspection, and Process Control for Microlithography XVIII; (2004) https://doi.org/10.1117/12.537969
Event: Microlithography 2004, 2004, Santa Clara, California, United States

Abstract

As feature geometries decrease, the budgeted error for process variations decreases as well. Keeping these variations within budget is especially important in the area of gate linewidth control. Because of this, wafer-to-wafer control of gate linewidth becomes increasingly necessary. This paper shows results from 300 mm wafers with 90 nm technology that were trimmed during the gate formation process on an etch platform. After the process that opened the gate hard mask and stripped the resist, the wafers were measured using both an integrated scatterometer and a stand-alone CD-SEM. The measurements were then used to determine the appropriate amount to be trimmed by the Chemical Oxide Removal (COR) chamber that is also integrated onto the etch system. After the wafers were trimmed and etched, they were again measured on the integrated scatterometer and stand-alone CD-SEM. With the CD-SEM as the Reference Measurement System (RMS), Total Measurement Uncertainty (TMU) analysis was used to optimize the Optical Digital Profilometry (ODP) model, thus facilitating a significant reduction in gate linewidth variation. Because the measurement uncertainty of the scatterometer was reduced to a level approaching or below that of the RMS, an improvement to TMU analysis was developed. This improvement quantifies methods for determining the measurement uncertainty of the RMS under a variety of situations.

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Matthew Sendelbach, Wesley Natzle, Charles N. Archie, Bill Banke, Dan Prager, Dan Engelhard, Jason Ferns, Asao Yamashita, Merritt Funk, Fumihiko Higuchi, and Masayuki Tomoyasu "Feedforward of mask open measurements on an integrated scatterometer to improve gate linewidth control", Proc. SPIE 5375, Metrology, Inspection, and Process Control for Microlithography XVIII, (24 May 2004); https://doi.org/10.1117/12.537969

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