Real-time microlithography employing a transparent liquid crystal display (LCD) panel as a configurable mask

Sung Hoon Pieh; Byoung-Ho Park; Yu-Jin Jang; Kang-Hyun Kim; Gyu-Tae Kim

doi:10.1117/12.534501

28 May 2004 Real-time microlithography employing a transparent liquid crystal display (LCD) panel as a configurable mask

Sung Hoon Pieh, Byoung-Ho Park, Yu-Jin Jang, Kang-Hyun Kim, Gyu-Tae Kim

Author Affiliations +

Proceedings Volume 5377, Optical Microlithography XVII; (2004) https://doi.org/10.1117/12.534501
Event: Microlithography 2004, 2004, Santa Clara, California, United States

Abstract

We describe a simple concept of an in situ photolithographic technique by using a liquid crystal display panel as a configurable mask and a CCD (charge coupled device) camera as a simple imaging system. The successive operation of imaging and configurable masking enabled a real-time projection lithography process by the selective exposure of light through LCD (liquid crystal display) panel. A correction of a defect pattern could be also demonstrated by optimizing the exposure conditions and aligning the mismatches between imaging and the corresponding lithographic patterning.

Citation Download Citation

Sung Hoon Pieh, Byoung-Ho Park, Yu-Jin Jang, Kang-Hyun Kim, and Gyu-Tae Kim "Real-time microlithography employing a transparent liquid crystal display (LCD) panel as a configurable mask", Proc. SPIE 5377, Optical Microlithography XVII, (28 May 2004); https://doi.org/10.1117/12.534501

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