Electrostatic operation and curvature modeling for a MEMS flexible film actuator

B. Edmonds Jr.; J. Ernstberger; K. Ghosh; J. Malaugh; D. Nfodjo; W. Samyono; X. Xu; David Edward Dausch; Scott Goodwin; Ralph C. Smith

doi:10.1117/12.547389

26 July 2004 Electrostatic operation and curvature modeling for a MEMS flexible film actuator

B. Edmonds Jr., J. Ernstberger, K. Ghosh, J. Malaugh, D. Nfodjo, W. Samyono, X. Xu, David Edward Dausch, Scott Goodwin, Ralph C. Smith

Author Affiliations +

Proceedings Volume 5383, Smart Structures and Materials 2004: Modeling, Signal Processing, and Control; (2004) https://doi.org/10.1117/12.547389
Event: Smart Structures and Materials, 2004, San Diego, CA, United States

Abstract

In this paper we develop a mathematical model to simulate the actuation of a multilayer metallic strip. In the first step of the model development, we employ previous theory to quantify the radius of curvature in the unimorph due to differing thermal coefficients in the constituent materials. The resulting radius of curvature is subsequently used to compute the voltage required to uncurl the actuator. Numerical experiments were performed with the model and the trends were found to be in agreement with experimental data.

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B. Edmonds Jr., J. Ernstberger, K. Ghosh, J. Malaugh, D. Nfodjo, W. Samyono, X. Xu, David Edward Dausch, Scott Goodwin, and Ralph C. Smith "Electrostatic operation and curvature modeling for a MEMS flexible film actuator", Proc. SPIE 5383, Smart Structures and Materials 2004: Modeling, Signal Processing, and Control, (26 July 2004); https://doi.org/10.1117/12.547389

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