Interferometric sensor and calibration system for high-precision applications

Matthias Welter; Eberhard Manske; Gerd Jaeger

doi:10.1117/12.538913

27 July 2004 Interferometric sensor and calibration system for high-precision applications

Matthias Welter, Eberhard Manske, Gerd Jaeger

Proceedings Volume 5384, Smart Structures and Materials 2004: Smart Sensor Technology and Measurement Systems; (2004) https://doi.org/10.1117/12.538913
Event: Smart Structures and Materials, 2004, San Diego, CA, United States

Abstract

This paper describes the basic principle of an interferometric angle and length sensor and its application. The sensor is the main part of a compact calibration system that can be used to calibrate and test one-dimensional length measurement systems. It is built by integrating the sensor into a positioning stage and setting up a DSP-based hardware and software signal processing system. A PC-based frontend using Matlab allows for easy setup of user-specific scripts for numerous calibration tasks. The sensor's and system's capabilities have been demonstrated using a high-resolution autocollimator, an AFM and an inductive tactile probe as calibration samples. Calibrations are possible with step sizes ranging from 20pm up to ±6μm and several waveforms for dynamic calibrations at frequencies currently up to 2 kHz.

Citation Download Citation

Matthias Welter, Eberhard Manske, and Gerd Jaeger "Interferometric sensor and calibration system for high-precision applications", Proc. SPIE 5384, Smart Structures and Materials 2004: Smart Sensor Technology and Measurement Systems, (27 July 2004); https://doi.org/10.1117/12.538913

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