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29 July 2004 Development of biosensor based on microdiaphragm
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There is an urgent need for real-time bio-detectors with high performance, such as high sensitivity, small size, easy deployment. Sensor platforms based on MEMS, such as microcantilevers (including piezoelectric and silicon-based cantilevers), have been studied. Piezoelectric-based micro-diaphragm, micro-electromechanical diaphragm (MEMD), used as micro-sensor platform, is reported in this article. It is found that the sensitivity of the sensor based on micro-diaphragm is much higher than that based on the micro-cantilever. Since a lower density of material used in the diaphragm results in a better sensitivity, PVDF-based piezoelectric polymer was chosen to fabricate the devices. Both cantilevers and diaphragms made of the same piezoelectric polymer were characterized in order to compare the difference of quality merit factor (Q-value) between the cantilever and diaphragm. It is experimentally found that the Q-value of the diaphragm is higher than that of the cantilever. More importantly, the damping effect of liquid media on diaphragm is much smaller than that that on cantilever. All these indicate that as a sensor platform the micro-diaphragm is much better than the micro-cantilever.
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Suiqiong Li, Zhimin Li, Bryan B. Chin, and Zhong-Yang Cheng "Development of biosensor based on microdiaphragm", Proc. SPIE 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (29 July 2004);

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