Microelectromechanical (MEMS) varactors for mobile communications

Maxim V. Shakhrai

doi:10.1117/12.555375

5 April 2004 Microelectromechanical (MEMS) varactors for mobile communications

Maxim V. Shakhrai

Proceedings Volume 5400, Seventh International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering; (2004) https://doi.org/10.1117/12.555375
Event: 2003 Chapter books, 2003, Bellingham, WA, United States

Abstract

Short overview of various microelectromechanical (MEMS) varactor types potentially suitable for mobile communications of the new generation is given. Special attention is given to MEMS varactors with electrostatic drive which are mostly widespread. Important varactor characteristics are compared for different varactor types.

Citation Download Citation

Maxim V. Shakhrai "Microelectromechanical (MEMS) varactors for mobile communications", Proc. SPIE 5400, Seventh International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering, (5 April 2004); https://doi.org/10.1117/12.555375

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