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30 August 2004 InGaAs/InP focal plane arrays for visible light imaging
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Abstract
We report on recent results in using InGaAs/InP focal plane arrays for visible light imaging. We have fabricated substrate-removed backside illuminated InGaAs/InP focal plane arrays down to a 10 μm pitch with high quantum efficiency from 0.4 μm through 1.7 μm. This focal plane array can be used for visible imaging as well as imaging eye-safe lasers. Using the InGaAs/InP materials system for visible imaging applications has several advantages over silicon based CMOS or CCD imagers including inherent radiation hardness, the ability to simultaneously achieve low crosstalk (less than 1%), and bandwidths exceeding 1 GHz, as well as the ability to image out to 1.7 μm.
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Tara J. Martin, Marshall J. Cohen, J. Christopher Dries, and Michael J. Lange "InGaAs/InP focal plane arrays for visible light imaging", Proc. SPIE 5406, Infrared Technology and Applications XXX, (30 August 2004); https://doi.org/10.1117/12.542523
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