Specular diffraction on nanometric grating

Dalibor Ciprian; Jaromir Pistora

doi:10.1117/12.560098

7 April 2004 Specular diffraction on nanometric grating

Dalibor Ciprian, Jaromir Pistora

Proceedings Volume 5445, Microwave and Optical Technology 2003; (2004) https://doi.org/10.1117/12.560098
Event: Microwave and Optical Technology 2003, 2003, Ostrava, Czech Republic

Abstract

Nanometric diffraction grating structure exhibits the same macroscopic properties as the effective layer of uniaxial continuous material. Power reflectance of such dielectric lamellar structure was computed using RCWA theory. Angular spectra of power reflectance were subsequently used as the input to the optimization procedure in order to find effective indices of refraction. The spectral dependence of effective parameters was obtained as well as the fill factor dependence. The results were confronted with the simple model of effective permitivitties. The results support the idea, that the effective media models should include the role of the substrate.

Citation Download Citation

Dalibor Ciprian and Jaromir Pistora "Specular diffraction on nanometric grating", Proc. SPIE 5445, Microwave and Optical Technology 2003, (7 April 2004); https://doi.org/10.1117/12.560098

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