LEEPL data conversion system

Masahiro Shoji; Nobuyasu Horiuchi

doi:10.1117/12.557778

20 August 2004 LEEPL data conversion system

Masahiro Shoji, Nobuyasu Horiuchi

Proceedings Volume 5446, Photomask and Next-Generation Lithography Mask Technology XI; (2004) https://doi.org/10.1117/12.557778
Event: Photomask and Next Generation Lithography Mask Technology XI, 2004, Yokohama, Japan

Abstract

PATACON-LEEPL is a software product for converting semiconductor mask CAD data to the EB data of masks for LEEPL transcribing devices. This software has several functions, such as pattern placement function corresponding to the structure of the LEEPL mask, which is different from the mask for optical steppers, complementary division function for stencil masks, correction of distortion due to mask internal stress, and alignment mark insertion. This software operates in the environment in which several to some hundreds of Linux PC's are connected by a high-speed network.

Citation Download Citation

Masahiro Shoji and Nobuyasu Horiuchi "LEEPL data conversion system", Proc. SPIE 5446, Photomask and Next-Generation Lithography Mask Technology XI, (20 August 2004); https://doi.org/10.1117/12.557778

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