Stencil mask defect inspection system and advanced application

Satoru Maruyama; Nakahiro Harada; Jiro Yamamoto; Naoyuki Nakamura

doi:10.1117/12.557819

20 August 2004 Stencil mask defect inspection system and advanced application

Satoru Maruyama, Nakahiro Harada, Jiro Yamamoto, Naoyuki Nakamura

Proceedings Volume 5446, Photomask and Next-Generation Lithography Mask Technology XI; (2004) https://doi.org/10.1117/12.557819
Event: Photomask and Next Generation Lithography Mask Technology XI, 2004, Yokohama, Japan

Abstract

A new inspection system for stencil mask using transmission electron beam (E-beam) has been developed to detect defects on masks for Electron Projection Lithography (EPL) and Low Energy E-beam Proximity projection Lithography (LEEPL) for 65nm design rule and beyond. For high-performance image acquisition, the combination of multi-line Time Delay integration (TDI)- CCD camera and electron optic system (EOS) have been achieved very wide field-of-view and accurate imaging in this system. In Image Processing Unit, “Multi Algorithm Processing” is used for defect detection. One of “Multi Algorithm Processing” focuses on defects at corners of patterns. This is a new and very flexible algorithm to detect corner defects. It realizes very high detection performance compared with conventional Die-To-Database inspection. The minimum detectable defect size is smaller than 1 pixel. The pixel size is 50 nm for EPL mask and 30 nm for LEEPL mask. The performance of the system also has been confirmed using resist pattern wafer inspection results after EPL and LEEPL printing.

Citation Download Citation

Satoru Maruyama, Nakahiro Harada, Jiro Yamamoto, and Naoyuki Nakamura "Stencil mask defect inspection system and advanced application", Proc. SPIE 5446, Photomask and Next-Generation Lithography Mask Technology XI, (20 August 2004); https://doi.org/10.1117/12.557819

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available