Fabrication of optical waveguides using laser direct writing method

Sung H. Cho; Jung Min Kim; Jae G. Kim; Won S. Chang; Eung S. Lee

doi:10.1117/12.546816

20 September 2004 Fabrication of optical waveguides using laser direct writing method

Sung H. Cho, Jung Min Kim, Jae G. Kim, Won S. Chang, Eung S. Lee

Proceedings Volume 5448, High-Power Laser Ablation V; (2004) https://doi.org/10.1117/12.546816
Event: High-Power Laser Ablation, 2004, Taos, New Mexico, United States

Abstract

Laser direct writing (LDW) process is developed using 3-rd harmonic Diode Pumped Solid State Laser (DPSSL) with the near UV wavelength of 355 nm. Photo-sensitive curable polymer is irradiated by UV laser and developed using polymer solvent to obtain quasi-3D patterns. We performed basic experiments for the various process conditions such as laser power, writing speed, laser focus, and optical polymer property to get the optimal conditions. This process could be applied to fabricate a single-mode waveguide without expensive mask projection method. Experimentally, the patterns of trapezoidal shape were manufactured into dimension of 8.4μm width and 7.5μm height. Propagation loss of planar waveguide was 1.42 dB/cm at wavelength of 1,550 nm.

Citation Download Citation

Sung H. Cho, Jung Min Kim, Jae G. Kim, Won S. Chang, and Eung S. Lee "Fabrication of optical waveguides using laser direct writing method", Proc. SPIE 5448, High-Power Laser Ablation V, (20 September 2004); https://doi.org/10.1117/12.546816

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