High-resolution EUV Microstepper tool for resist testing and technology evaluation

Adam Brunton; Julian S. Cashmore; Peter Elbourn; Graeme Elliner; Malcolm C. Gower; Philipp Grunewald; M. Harman; S. Hough; N. McEntee; S. Mundair; D. Rees; P. Richards; V. Truffert; Ian Wallhead; Michael D. Whitfield

doi:10.1117/12.548341

20 September 2004 High-resolution EUV Microstepper tool for resist testing and technology evaluation

Adam Brunton, Julian S. Cashmore, Peter Elbourn, Graeme Elliner, Malcolm C. Gower, Philipp Grunewald, M. Harman, S. Hough, N. McEntee, S. Mundair, D. Rees, P. Richards, V. Truffert, Ian Wallhead, Michael D. Whitfield

Author Affiliations +

Proceedings Volume 5448, High-Power Laser Ablation V; (2004) https://doi.org/10.1117/12.548341
Event: High-Power Laser Ablation, 2004, Taos, New Mexico, United States

Abstract

Key features are presented of the Exitech MS-13 EUV Microstepper tool developed for EUV resist testing & technology evaluation at the 32nm node and beyond. Details of the tool design architecture, module layout, vacuum chamber, major subsystems including source, optics and performance specifications are given.

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Adam Brunton, Julian S. Cashmore, Peter Elbourn, Graeme Elliner, Malcolm C. Gower, Philipp Grunewald, M. Harman, S. Hough, N. McEntee, S. Mundair, D. Rees, P. Richards, V. Truffert, Ian Wallhead, and Michael D. Whitfield "High-resolution EUV Microstepper tool for resist testing and technology evaluation", Proc. SPIE 5448, High-Power Laser Ablation V, (20 September 2004); https://doi.org/10.1117/12.548341

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