Open Access Paper
20 September 2004 Nanostructuring of solids with femtosecond laser pulses (Keynote Address)
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Abstract
Investigations of possibilities for nanostructuring with femtosecond laser pulses of different materials are reported. The aim is to develop a simple laser-based technology for the fabrication of two- and three-dimensional nanostructures with structure sizes on the order of several hundred nanometers. This is required for many applications in photonics, for the fabrication of photonic crystals and microoptical devices, for data storage, displays, etc. Sub-wavelength structuring of metals by direct femtosecond laser ablation is performed. The band gap dependence of the minimum structure size for transparent materials is identified.
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Andreas Ostendorf, Juergen Koch, Frank Korte, and Boris N. Chichkov "Nanostructuring of solids with femtosecond laser pulses (Keynote Address)", Proc. SPIE 5448, High-Power Laser Ablation V, (20 September 2004); https://doi.org/10.1117/12.546496
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Cited by 4 scholarly publications.
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KEYWORDS
Femtosecond phenomena

Nanolithography

Nanostructuring

Laser ablation

Metals

Nanostructures

Solids

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