Silicon-on-insulator photonic bandgap structures for future microphotonic devices

Emmanuel Hadji; Benoit Cluzel; D. Sotta; Marc Zelsmann; Emmanuel Picard; Vincent Calvo; Thomas Charvolin; Michel Heitzmann; Hubert Moriceau; Christian Seassal; Xavier Letartre; Patrick Ferrand

doi:10.1117/12.544666

15 September 2004 Silicon-on-insulator photonic bandgap structures for future microphotonic devices

Emmanuel Hadji, Benoit Cluzel, D. Sotta, Marc Zelsmann, Emmanuel Picard, Vincent Calvo, Thomas Charvolin, Michel Heitzmann, Hubert Moriceau, Christian Seassal, Xavier Letartre, Patrick Ferrand

Author Affiliations +

Proceedings Volume 5450, Photonic Crystal Materials and Nanostructures; (2004) https://doi.org/10.1117/12.544666
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

Silicon on insulator (SOI) substrates provide a naturally good template for the introduction of optics at the microelectronics device level, due to the high refractive index contrast between Si and SiO₂. If one is able to control the propagation of photons in the material, functional devices like, filters, modulators or resonant detectors can be envisioned. One can even imagine to make light emitters since recent progress showed room temperature light emission from doped silicon material or nano-crystalline silicon. This suggests that combining these new materials with low volume optical resonators will allow to make efficient light sources based on Si and opens a route towards CMOS compatible silicon-based light emitters. A promising way to integrate this functions in compact large-scale photonic circuits is to use photonic crystals (PCs). In this work we will present the design, fabrication and optical characterization of SOI based PC resonators engineered to change the emissio rate and/or extraction of photons from the Si layer. Different structures have been studied: vertical microcavities, in-plane 2D hexagonal cavities and defect-less structures and results demonstrating strong light extraction enhancement will be shown together with calculations made by plane wave expansion techniques and FDTD.

Citation Download Citation

Emmanuel Hadji, Benoit Cluzel, D. Sotta, Marc Zelsmann, Emmanuel Picard, Vincent Calvo, Thomas Charvolin, Michel Heitzmann, Hubert Moriceau, Christian Seassal, Xavier Letartre, and Patrick Ferrand "Silicon-on-insulator photonic bandgap structures for future microphotonic devices", Proc. SPIE 5450, Photonic Crystal Materials and Nanostructures, (15 September 2004); https://doi.org/10.1117/12.544666

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available