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18 August 2004 Passive and active sol-gel integrated optics for heterogeneous integration
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The advantage of hybrid organic-inorganic sol-gel as a simple, low-cost method for the fabrication of optoelectronic integration is described. High performance integrated optics using mulit-layer photo-patternable hybrid sol-gel on high-index InP compound semiconductor is achieved. An MMI based 1x12 beam splitter with low polarization sensitivity and high uniformity is demonstrated. The development of EO and NLO active sol-gels are described and the fabrication of active waveguides are presented. The chromophore doped active sol-gels demonstrate high stability which makes them attractive material for integrated optoelectronics. The results show the great potential of the hybrid sol-gel for heterogeneous integration with semiconductor lasers and optoelectronic components.
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Mahmoud Fallahi "Passive and active sol-gel integrated optics for heterogeneous integration", Proc. SPIE 5451, Integrated Optics and Photonic Integrated Circuits, (18 August 2004);

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