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8 September 2004 Development of microlens arrays for high-speed optical communication
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Abstract
In this study, polymeric microlens arrays, well suited for high-volume and low-cost production, were developed for efficiently coupling the light from vertical-cavity surface emitting lasers (VCSELs) to multi-mode fiber ribbon. They were fabricated by microinjection molding with Ni-electroplated mold insert. Modified LIGA processes and the Ni-electroplating are used to make the master and the metallic mold insert, respectively. In this study, microinjection molding with metallocene based cyclic olefin copolymer (mCOC) was chosen to replicate microlenses. Good surface profile and high dimensional accuracy are achieved. Coupling efficiency of 55 +/- 3 % with a working distance of 400 +/- 60 micrometer is obtained. To verify its applications on high-speed interconnections, we also designed the evaluated board and set up an opto-electronic measurement platform. The high-speed measurement shows that the electrical-to-optical conversion 3dB-bandwidth is above 1.8 GHz, and the eye diagram at 2.488 Gbps is acceptable for the SONET OC-48 eye mask.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chih-Hsiang Ko, Chun-Hsu Lin, Bor-Chen Tsai, His-Hsin Shih, Chien-Tsung Wu, Yu-Lin Chao, Yu-Kon Chou, Chun-Hsun Chu, Yii-Tay Chiou, and Rax Chen "Development of microlens arrays for high-speed optical communication", Proc. SPIE 5454, Micro-Optics: Fabrication, Packaging, and Integration, (8 September 2004); https://doi.org/10.1117/12.545371
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