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16 August 2004 A tilting micromirror with well-controlled digital angle through constrained lever structure
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Abstract
In this paper, a tilting micromirror device that can achieve designed angle is proposed. A lever structure, driven by electrostatic actuators, was used to enlarge tilting angle. To obtain precise deflecting angle, the lever structure is constrained by the substrate. By applying a voltage, the electrostatic actuators drive the lever down to the substrate such that the micromirror device on the opposite side of the lever structure could be lifted. PolyMUMPs process was used to fabricate proposed micromirror devices. The actuators are simulated to investigate characteristics of the micromirror devices. Experimental results had indicated that the micromirror device could reach 10-degree tilting angle with 80V driving signal with 6.4% relative error compared to designed model.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jin-Chern Chiou, Chin-Fu Kuo, and Yu-Chen Lin "A tilting micromirror with well-controlled digital angle through constrained lever structure", Proc. SPIE 5455, MEMS, MOEMS, and Micromachining, (16 August 2004); https://doi.org/10.1117/12.545378
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