High-resolution shape measurements with phase-shifting Schlieren (PSS)

Luc C. Joannes; Didier Beghuin; Renaud Ligot; Sebastien Farinotti; Olivier Dupont

doi:10.1117/12.545536

10 September 2004 High-resolution shape measurements with phase-shifting Schlieren (PSS)

Luc C. Joannes, Didier Beghuin, Renaud Ligot, Sebastien Farinotti, Olivier Dupont

Proceedings Volume 5457, Optical Metrology in Production Engineering; (2004) https://doi.org/10.1117/12.545536
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

A new technique to measure shapes and deformation with a high resolution is proposed. It combines the conventional Schlieren technique principle with the phase-shifting approach generally used in interferometry. By an adequate Schlieren filter and an adapted set-up, some Schlieren Fringes are generated. After the application of the phase shift technique, the Schlieren phase is calculated and converted into beam deviation values, which are integrated to deduce the object's shape. Both theoretical and experimental demonstrations are given. The technique is first validated on a reference target. With a setup working in reflection, we have measured the curvature radius of a lens surface with accuracy better than 1%. Then an application in a fluid physics experiment is given. The shape of a liquid-gas interface in a conventional Marangoni-Benard experiment has been measured with a resolution of 30nm and amplitudes up to 50μm. The shape of MEMS has also been measured in a PSS microscope with a nanometric resolution. Finally, we propose an adaptation of the setup to make it possible the measurement of fast phenomena at video frame rate.

Citation Download Citation

Luc C. Joannes, Didier Beghuin, Renaud Ligot, Sebastien Farinotti, and Olivier Dupont "High-resolution shape measurements with phase-shifting Schlieren (PSS)", Proc. SPIE 5457, Optical Metrology in Production Engineering, (10 September 2004); https://doi.org/10.1117/12.545536

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available